Member:Nakakubo
京大推進研
（版間での差分）
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*学年：博士課程2年 | *学年：博士課程2年 | ||
*所属学会：応用物理学会 | *所属学会：応用物理学会 | ||
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| + | ==学術論文== | ||
| + | *Yoshinori Nakakubo, Asahiko Matsuda, Masanaga Fukasawa, Yoshinori Takao, Tetsuya Tatsumi, Koji Eriguchi, and Kouichi Ono: "Optical and Electrical Characterization of Hydrogen-Plasma-Damaged Silicon Surface Structures and Its Impact on In-line Monitoring", Jpn. J. Appl. Phys. '''49''' (2010) 08JD02. http://jjap.ipap.jp/link?JJAP/49/08JD02/ | ||
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| + | ほか →[[論文]] | ||
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| + | ==著書== | ||
| + | *Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Hiroaki Ohta, Koji Eriguchi, and Kouichi Ono: "Chapter 8: Analysis of Si Substrate Damage Induced by Inductively Coupled Plasma Reactor with Various Superposed Bias Frequencies", in Emerging Technologies and Circuits, eds. Amara Amara, Thomas Ea, and Marc Belleville. Lecture Notes in Electrical Engineering 66 (Springer, London, 2010) Part IV, pp. 107-120. ISBN 978-90-481-9378-3. | ||
2011年10月25日 (火) 19:12時点における版
中久保 義則 / Yoshinori Nakakubo
- 学年：博士課程2年
- 所属学会：応用物理学会
学術論文
- Yoshinori Nakakubo, Asahiko Matsuda, Masanaga Fukasawa, Yoshinori Takao, Tetsuya Tatsumi, Koji Eriguchi, and Kouichi Ono: "Optical and Electrical Characterization of Hydrogen-Plasma-Damaged Silicon Surface Structures and Its Impact on In-line Monitoring", Jpn. J. Appl. Phys. 49 (2010) 08JD02. http://jjap.ipap.jp/link?JJAP/49/08JD02/
ほか →論文
著書
- Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Hiroaki Ohta, Koji Eriguchi, and Kouichi Ono: "Chapter 8: Analysis of Si Substrate Damage Induced by Inductively Coupled Plasma Reactor with Various Superposed Bias Frequencies", in Emerging Technologies and Circuits, eds. Amara Amara, Thomas Ea, and Marc Belleville. Lecture Notes in Electrical Engineering 66 (Springer, London, 2010) Part IV, pp. 107-120. ISBN 978-90-481-9378-3.