Publications/International conferences
京大推進研
(版間での差分)
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===2014=== | ===2014=== | ||
− | * [Invited] Koji Eriguchi: "Modeling of plasma-induced damage during the etching of ultimately-scaled transistors in ULSI circuits---A model prediction of damage in three dimensional structures", [http://www.ne.ncsu.edu/gec2014/GEC_2014/Welcome.html The 67th Annual Gaseous Electronics Conference (GEC)], November 02-07, 2014, Marriott City Center & Raleigh Convention Center, Raleigh, North Carolina, ET2-4, Bull. Am. Phys. Soc. | + | * Nobuya Nakazaki, Haruka Matsumoto, Koji Eriguchi, Kouichi Ono: "Surface Roughening Mechanisms and Roughness Suppression during Si Etching in Inductively Coupled Cl2 Plasmas", [https://www.avs.org/Meetings-Exhibits/AVS-61st-International-Symposium-Exhibition/Information AVS 61st International Symposium & Exhibition], November 09-14, 2014, the Baltimore Convention Center, Baltimore, Maryland, PS1-WeM-12. |
− | * Takuya kobatake, Masanori Deguchi, junya Suzuki, Koji Eriguchi, and Kouichi Ono: "Optical Diagnostics of Air Flows Induced in Surface Dielectric Barrier Discharge Plasma Actuator", [http://www.ne.ncsu.edu/gec2014/GEC_2014/Welcome.html The 67th Annual Gaseous Electronics Conference (GEC)], November 02-07, 2014, Marriott City Center & Raleigh Convention Center, Raleigh, North Carolina, CT2-4, Bull. Am. Phys. Soc. | + | * Koji Eriguchi, Masao Noma (SHINKO SEIKI CO., LTD., Japan), Shigehiko Hasegawa (Osaka University, Japan), Michiru Yamashita (Hyogo Prefectural Institute of Tech., Japan), Kouichi Ono: "A Novel Reactive Plasma-Assisted Coating Technique (RePAC) for Thin BN/Crystalline-Si Structures and their Mechanical and Electrical Properties", [https://www.avs.org/Meetings-Exhibits/AVS-61st-International-Symposium-Exhibition/Information AVS 61st International Symposium & Exhibition], November 09-14, 2014, the Baltimore Convention Center, Baltimore, Maryland, SE+NS+TR-TuM-3. |
− | + | * Nobuya Nakazaki, Koji Eriguchi, and Kouichi Ono: "Molecular dynamics analysis of silicon chloride ion incidence during Si etching in Cl-based plasmas: Effects of ion incident energy, angle, and neutral radical-to-ion flux ratio", [http://www.ne.ncsu.edu/gec2014/GEC_2014/Welcome.html The 67th Annual Gaseous Electronics Conference (GEC)], November 02-07, 2014, Marriott City Center & Raleigh Convention Center, Raleigh, North Carolina, ET2-5, Bull. Am. Phys. Soc. 59(9) p. 26. | |
+ | * [Invited] Koji Eriguchi: "Modeling of plasma-induced damage during the etching of ultimately-scaled transistors in ULSI circuits---A model prediction of damage in three dimensional structures", [http://www.ne.ncsu.edu/gec2014/GEC_2014/Welcome.html The 67th Annual Gaseous Electronics Conference (GEC)], November 02-07, 2014, Marriott City Center & Raleigh Convention Center, Raleigh, North Carolina, ET2-4, Bull. Am. Phys. Soc. 59(9) p. 25. | ||
+ | * Takuya kobatake, Masanori Deguchi, junya Suzuki, Koji Eriguchi, and Kouichi Ono: "Optical Diagnostics of Air Flows Induced in Surface Dielectric Barrier Discharge Plasma Actuator", [http://www.ne.ncsu.edu/gec2014/GEC_2014/Welcome.html The 67th Annual Gaseous Electronics Conference (GEC)], November 02-07, 2014, Marriott City Center & Raleigh Convention Center, Raleigh, North Carolina, CT2-4, Bull. Am. Phys. Soc. 59(9) p. 17. | ||
* M. Kamei, Y. Takao, K. Eriguchi, and K. Ono: "TDDB Lifetime Enhancement of High-k MOSFETs Damaged by Plasma Processing – Conflicting Results in Plasma Charging Damage Evaluation", IEEE International Integrated Reliability Workshop (IIRW), 6.1, (2014). | * M. Kamei, Y. Takao, K. Eriguchi, and K. Ono: "TDDB Lifetime Enhancement of High-k MOSFETs Damaged by Plasma Processing – Conflicting Results in Plasma Charging Damage Evaluation", IEEE International Integrated Reliability Workshop (IIRW), 6.1, (2014). | ||
* Koji Eriguchi, Yoshinori Takao, Kouichi Ono: "A New Aspect of Plasma‐Induced Physical Damage in Three‐Dimensional Scaled Structures", IEEE Proc. Int. Conf. on Integrated Circuit Design & Technol. (ICICDT), May 30th (2014). | * Koji Eriguchi, Yoshinori Takao, Kouichi Ono: "A New Aspect of Plasma‐Induced Physical Damage in Three‐Dimensional Scaled Structures", IEEE Proc. Int. Conf. on Integrated Circuit Design & Technol. (ICICDT), May 30th (2014). |
2014年11月13日 (木) 14:29時点における版
国際会議発表一覧 (過去6年間)(Showing presentations in the last 6 years)
目次 |
2014
- Nobuya Nakazaki, Haruka Matsumoto, Koji Eriguchi, Kouichi Ono: "Surface Roughening Mechanisms and Roughness Suppression during Si Etching in Inductively Coupled Cl2 Plasmas", AVS 61st International Symposium & Exhibition, November 09-14, 2014, the Baltimore Convention Center, Baltimore, Maryland, PS1-WeM-12.
- Koji Eriguchi, Masao Noma (SHINKO SEIKI CO., LTD., Japan), Shigehiko Hasegawa (Osaka University, Japan), Michiru Yamashita (Hyogo Prefectural Institute of Tech., Japan), Kouichi Ono: "A Novel Reactive Plasma-Assisted Coating Technique (RePAC) for Thin BN/Crystalline-Si Structures and their Mechanical and Electrical Properties", AVS 61st International Symposium & Exhibition, November 09-14, 2014, the Baltimore Convention Center, Baltimore, Maryland, SE+NS+TR-TuM-3.
- Nobuya Nakazaki, Koji Eriguchi, and Kouichi Ono: "Molecular dynamics analysis of silicon chloride ion incidence during Si etching in Cl-based plasmas: Effects of ion incident energy, angle, and neutral radical-to-ion flux ratio", The 67th Annual Gaseous Electronics Conference (GEC), November 02-07, 2014, Marriott City Center & Raleigh Convention Center, Raleigh, North Carolina, ET2-5, Bull. Am. Phys. Soc. 59(9) p. 26.
- [Invited] Koji Eriguchi: "Modeling of plasma-induced damage during the etching of ultimately-scaled transistors in ULSI circuits---A model prediction of damage in three dimensional structures", The 67th Annual Gaseous Electronics Conference (GEC), November 02-07, 2014, Marriott City Center & Raleigh Convention Center, Raleigh, North Carolina, ET2-4, Bull. Am. Phys. Soc. 59(9) p. 25.
- Takuya kobatake, Masanori Deguchi, junya Suzuki, Koji Eriguchi, and Kouichi Ono: "Optical Diagnostics of Air Flows Induced in Surface Dielectric Barrier Discharge Plasma Actuator", The 67th Annual Gaseous Electronics Conference (GEC), November 02-07, 2014, Marriott City Center & Raleigh Convention Center, Raleigh, North Carolina, CT2-4, Bull. Am. Phys. Soc. 59(9) p. 17.
- M. Kamei, Y. Takao, K. Eriguchi, and K. Ono: "TDDB Lifetime Enhancement of High-k MOSFETs Damaged by Plasma Processing – Conflicting Results in Plasma Charging Damage Evaluation", IEEE International Integrated Reliability Workshop (IIRW), 6.1, (2014).
- Koji Eriguchi, Yoshinori Takao, Kouichi Ono: "A New Aspect of Plasma‐Induced Physical Damage in Three‐Dimensional Scaled Structures", IEEE Proc. Int. Conf. on Integrated Circuit Design & Technol. (ICICDT), May 30th (2014).
- Masayuki Kamei, Yoshinori Takao, Koji Eriguchi, Kouichi Ono: "Random Telegraph Noise as a New Measure of Plasma‐Induced Charging Damage in MOSFETs", IEEE Proc. Int. Conf. on Integrated Circuit Design & Technol. (ICICDT), May 30th (2014).
- K. Eriguchi, Y. Takao, K. Ono:"Plasma-Induced Damage in 3D Structures behind Device Scaling", Plasma Etch and Strip in Microtechnology (PESM), May 11th (2014), France.
- M. Noma, K. Eriguchi, S. Hasegawa, M.Yamashita, Y. Takao, N.Terayama, K. Ono:"Effects of ion-bombardment damage on mechanical properties of c-BN thin films formed by a magnetically-enhanced plasma ion plating method", The 6th Int. Symp. Adv. Plasma Sci. and its Application for Nitrides and Nanomaterials / 7th Int. Conf. on Plasma Nano-Technol. & Sci.(March 5th, 2014), 05pP48.
- M. Noma, K. Eriguchi, S. Hasegawa, M.Yamashita, Y. Takao, N.Terayama, K. Ono:"Impacts of plasma process parameters on mechanical properties of c-BN thin-films", The 8th Int. Conf. Reactive Plasmas / 31st Symp. Plasma Processing, 5B-AM-O2 (Feb. 5th, 2014).
- Nobuya Nakazaki(D), Yoshinori Takao, Koji Eriguchi, Kouichi Ono: "Surface roughening during Si etching in inductively coupled Cl2 plasmas", 8th International Conference on Reactive Plasmas, 31st Symposium on Plasma Processing, February 3-7, 2014 Fukuoka Convention Center, Fukuoka, Japan, 4B-PM-O2.
2013
- Nobuya Nakazaki(D), Yoshinori Takao, Koji Eriguchi, Kouichi Ono: "Molecular Dynamics Analysis of Si Etching in HBr-based Plasmas: Ion Incident Energy and Angle Dependence", AVS 60th International Symposium & Exhibition, October 27-November 1, 2013, the Long Beach Convention Center, California, USA, PS-ThM-1.
- Asahiko Matsuda(D alum.), Yoshinori Nakakubo, Masanaga Fukasawa (Sony Corporation, Japan), Yoshinori Takao, Koji Eriguchi, Tetsuya Tatsumi (Sony Corporation, Japan), Kouichi Ono: "Effects of Plasma-Induced Si Damage Structures on Annealing Process Design—Gas Chemistry Impact", AVS 60th International Symposium & Exhibition, October 27-November 1, 2013, the Long Beach Convention Center, California, USA, PS-MoM-1.
- Koji Eriguchi, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono: "Molecular dynamics simulation of plasma-induced Si substrate damage: Latent defect structures and bias-frequency effects", The 66th Annual Gaseous Electronics Conference (GEC), September 30-October 4, 2013, the Westin Hotel, Princeton, New Jersey, NR2-3, Bull. Am. Phys. Soc. 58(8) p. 96.
- Nobuya Nakazaki(D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Surface Reaction Kinetics during Si Etching in Cl-based Plasmas: Effects of Etch By-Products Ion Incidence", The 66th Annual Gaseous Electronics Conference (GEC), September 30-October 4, 2013, the Westin Hotel, Princeton, New Jersey, LW1-6, Bull. Am. Phys. Soc. 58(8) p. 71.
- Junya Suzuki(M), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Airflows Induced by Asymmetric Bipolar Voltage Pulses in Dielectric Barrier Discharge Plasma Actuator", The 66th Annual Gaseous Electronics Conference (GEC), September 30-October 4, 2013, the Westin Hotel, Princeton, New Jersey, CT1-83, Bull. Am. Phys. Soc. 58(8) p. 31.
- Asahiko Matsuda(D alum.), Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "μ-Photoreflectance Spectroscopy for Microscale Monitoring of Plasma-induced Physical Damage", 35th International Symposium on Dry Process (DPS 2013), August 29-30, 2013, Ramada Plaza Jeju Hotel, Korea, A-2, Proc. 35th Int. Symp. Dry Process, p.
- Koji Eriguchi, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono: "Scenario of plasma-induced physical damage in FinFET - the effects of "straggling" of incident ions by a range theory -", 35th International Symposium on Dry Process (DPS 2013), August 29-30, 2013, Ramada Plaza Jeju Hotel, Korea, G-1, Proc. 35th Int. Symp. Dry Process, p. 181.
- Nobuya Nakazaki(D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular dynamics analysis of Si etching in HBr-based Plasmas: Effects of neutral radicals", 35th International Symposium on Dry Process (DPS 2013), August 29-30, 2013, Ramada Plaza Jeju Hotel, Korea, P-74, Proc. 35th Int. Symp. Dry Process, p. 159.
- Kouichi ono: "Plasma Etch Challenges for Nanoscale Device Fabrication: Modeling, Analysis, and Control of Plasma-Surface Interactions", 35th International Symposium on Dry Process (DPS 2013), August 29-30, 2013, Ramada Plaza Jeju Hotel, Korea, Plenary-2, Proc. 35th Int. Symp. Dry Process, p. 47.
- Tomoki Hazama(M), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Basic Study on Plasma Characteristics of ECR Discharges Toward High Power Electric Propulsion", 29th International Symposium on Space Technology and Science (ISTS 2013), June 2-9, 2013, Nagoya Congress Center, Nagoya, Aichi, Japan, s-11-b, Proc. 29th ISTS, 2013, pp. 2013-s-11-b.
- Yoshinori Takao, Masataka Sakamoto, Koji Eriguchi, and Kouichi Ono: "Investigation of Plasma Characteristics and Ion Beam Extraction for a Micro RF Ion Thruster", 29th International Symposium on Space Technology and Science (ISTS 2013), June 2-9, 2013, Nagoya Congress Center, Nagoya, Aichi, Japan, b-19, Proc. 29th ISTS, 2013, pp. 2013-b-19.
- Daisuke Mori(M), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Microplasma Thruster Using Electron Cyclotron Resonance with Permanent Magnets", 29th International Symposium on Space Technology and Science (ISTS 2013), June 2-9, 2013, Nagoya Congress Center, Nagoya, Aichi, Japan, s-43-b, Proc. 29th ISTS, 2013, pp. 2013-s-43-b.
- [Invited] K. Eriguchi: " Modeling as a powerful tool for understanding surface damage during plasma processing of materials", Plasma Etch and Strip in Microtechnology (PESM), Leuven, Belgium, March 15, 2013. (invited)
- [Invited] Hirotaka Tsuda(D), Nobuya Nakazaki, Daisuke Fukushima, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Surface roughening during Si etching in inductively coupled Cl2 plasmas: Experimental investigations and a comparison with numerical simulations", The 6th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 2013), Feburary 2-3, 2013, Gero Synergy Center, Gero, Gifu, Japan, S-1. IC-PLANTS 2013 The 6th International Conference on Plasma-Nanotechnology & Science, 2013, pp. S-01.
2012
- Asahiko Matsuda(D), Yoshinori Nakakubo, M. Fukasawa, Yoshinori Takao, T. Tatsumi, Koji Eriguchi, and Kouichi Ono: "Three-Dimensional Parameter Mapping of Annealing Process for HBr/O2-Plasma-Induced Damages in Si Substrates", 34th International Symposium on Dry Process (DPS 2012), November 15-16, 2012, Takeda Hall, Takeda Sentanchi Building, The University of Tokyo, Tokyo, Japan, H-2, Proc. 34th Int. Symp. Dry Process, p. 181.
- Nobuya Nakazaki(M), Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Surface Structure and Etch Products in Si/Cl and Si/Br Systems", 34th International Symposium on Dry Process (DPS 2012), November 15-16, 2012, Takeda Hall, Takeda Sentanchi Building, The University of Tokyo, Tokyo, Japan, P-33, Proc. 34th Int. Symp. Dry Process, p. 91.
- Hirotaka Tsuda(D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Modeling and Simulation of Nanoscale Surface Roughness during Plasma Etching of Si: Mechanism and Reduction", 34th International Symposium on Dry Process (DPS 2012), November 15-16, 2012, Takeda Hall, Takeda Sentanchi Building, The University of Tokyo, Tokyo, Japan, A-3, Proc. 34th Int. Symp. Dry Process, p. 7.
- Hirotaka Tsuda(D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Formation Mechanisms of Nanoscale Surface Roughness and Rippling during Plasma Etching and Sputtering of Si under Oblique Ion Incidence", AVS 59th International Symposium & Exhibition, October 28-November 2, 2012, Tampa Convention Center, Florida, USA, PS2-TuA12
- Nobuya Nakazaki(M), Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Si Etching with Cl and Br Beams: Ion Incident Angle and Neutral Radical Flux Dependence", AVS 59th International Symposium & Exhibition, October 28-November 2, 2012, Tampa Convention Center, Florida, USA, PS2-TuA10
- Hirotaka Tsuda(D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Formation Mechanisms of Surface Roughening and Rippling during Plasma Etching and Sputtering of Silicon", The 65th Annual Gaseous Electronics Conference (GEC), October 22-26, 2012, the AT&T Conference Center on The University of Texas at Austin campus in Austin, Texas, USA, HW2-2, Bull. Am. Phys. Soc. 57(8) p. 45.
- Nobuya Nakazaki(M), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Physical and Chemical Behavior of Etch Products Desorbed during Si Etching in Cl- and Br-based Plasmas", The 65th Annual Gaseous Electronics Conference (GEC), October 22-26, 2012, the AT&T Conference Center on The University of Texas at Austin campus in Austin, Texas, USA, HW2-5, Bull. Am. Phys. Soc. 57(8) p. 46.
- Daisuke Mori(M), Tetsuo Kawanabe, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Microwave-Excited Microplasma Thrusters Using Surface Wave and Electron Cyclotron Resonance Discharges", The 65th Annual Gaseous Electronics Conference (GEC), October 22-26, 2012, the AT&T Conference Center on The University of Texas at Austin campus in Austin, Texas, USA, CT4-5, Bull. Am. Phys. Soc. 57(8) p. 22.
- Yoshinori Takao, Masataka Sakamoto, Koji Eriguchi, and Kouichi Ono: "Particle simulation of a micro inductively coupled plasma source including an external circuit", The 65th Annual Gaseous Electronics Conference (GEC), October 22-26, 2012, the AT&T Conference Center on The University of Texas at Austin campus in Austin, Texas, USA, PR1-31, Bull. Am. Phys. Soc. 57(8) p. 77.
- [Invited] K. Eriguchi: "High-k MOSFET performance degradation by plasma process-induced charging damage", IEEE International Integrated Reliability Workshop (IIRW), Fallen Leaf Lake, USA, Oct. 14, 2012.
- [Tutorial Lecture] Kouichi Ono: "Plasma Etching for Nanofabrication: Fundamentals, Current Status, and Future Prospects", The 11th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 25th Symposium on Plasma Science for Materials (SPSM), October 2-5, 2012, Kyoto University ROHM Plaza, Kyoto, Japan, Tutorial 1. Abstracts and Slides for Lecture, pp.1-20.
- Daisuke Mori(M), Tetsuo Kawanabe, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Microwave-Excited Microplasma Thrusters: Surface Wave-Excited Type and Electron Cyclotron Resonance-Excited Type", The 11th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 25th Symposium on Plasma Science for Materials (SPSM), October 2-5, 2012, Kyoto University ROHM Plaza, Kyoto, Japan, 1-P25. Abstracts, p.143.
- Hirotaka Tsuda(D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Rippling Mechanism of Nanoscale Surface during Plasma Etching of Si under Oblique Ion Incidence", The 11th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 25th Symposium on Plasma Science for Materials (SPSM), October 2-5, 2012, Kyoto University ROHM Plaza, Kyoto, Japan, 1-P60. Abstracts, p.176.
- Nobuya Nakazaki(M), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Si Etching in Cl- and Br-based Plasmas", The 11th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 25th Symposium on Plasma Science for Materials (SPSM), October 2-5, 2012, Kyoto University ROHM Plaza, Kyoto, Japan, 2-P28. Abstracts, p.266.
- Junya Suzuki(M), Tomoki Hazama, Tetsuo Kawanabe, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Characterization of Linear and Annular Dielectric Barrier Discharge Plasma", The 11th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 25th Symposium on Plasma Science for Materials (SPSM), October 2-5, 2012, Kyoto University ROHM Plaza, Kyoto, Japan, 3-P117. Abstracts, p.473.
- [Invited] Kouichi Ono: "Surface Roughening and Rippling during Plasma Etching", International Union of Materials Research Societies - International Conference on Electronic Materials 2012 (IUMRS-ICEM 2012), September 23-28, 2012, PACIFICO YOKOHAMA, Yokohama, Japan, D-4-I25-002.
- Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Miniature Ion Thruster using a Cylindrical Micro ICP", 48th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit (JPC), July 29 - August 1, 2012, Atlanta, GA, USA, AIAA-2012-3950.
- Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono: "Optimization Problems for Plasma-Induced Damage: A Concept for Plasma-Induced Damage Design", 2012 IEEE International Conference on IC Design & Technology (ICICDT), May 30-June 1, 2012, Austin, TX, USA.
- Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono: "Unifed Model-Prediction Framework for MOSFET Performance Degradation by Plasma-Induced Si Damage and its Application to Process Parameter Optimization", Plasma Etch and Strip in Microelectronics, March 15–16, 2012, Minatec, Grenoble, France.
- Asahiko Matsuda(D), Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Optical Characterization of Plasma-Induced Si Damage by Ar and Cl2 Inductively Coupled Plasmas", Plasma Etch and Strip in Microelectronics, March 15–16, 2012, Minatec, Grenoble, France.
- [Invited] Hirotaka Tsuda(D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Model Analysis of Nanoscale Surface Roughness and Rippling during Plasma Etching of Si under Oblique Ion Incidence: Effects of Oxygen Addition", The 5th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 2012), March 9-10, 2012, Freude, Inuyama International Sightseeing Center, Aichi, Japan, S-2. IC-PLANTS 2012 The 5th International Conference on Plasma-Nanotechnology & Science, 2012, pp. S-02.
- Nobuya Nakazaki(M), Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Si Etching with Cl beams: Ion Incident Angle and Neutral Radical Flux Dependence" , The 5th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 2012), March 9-10, 2012, Freude, Inuyama International Sightseeing Center, Aichi, Japan, S-2. IC-PLANTS 2012 The 5th International Conference on Plasma-Nanotechnology & Science, 2012, pp. P-36.
2011
- Hiroki Miyata (M), Hirotaka Tsuda, Daisuke Fukushima, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Fourier Transofrm Infrared Absorption Spectroscopy of Gas-Phase and Surface Reaction Products during Si Etching in Inductively Coupled Cl2 Plasmas", 64th Annual Gaseous Electronics Conference, November 15–18, 2011, Salt Palace Convention Center, Salt Lake City, Utah, USA, NR1-10, Bull. Am. Phys. Soc. 56(15) p. 64.
- Nobuya Nakazaki (M), Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Ion Incident Energy and Angle Dependences of Si etching with Cl, Br, and HBr beams", 64th Annual Gaseous Electronics Conference, November 15–18, 2011, Salt Palace Convention Center, Salt Lake City, Utah, USA, NR1-11, Bull. Am. Phys. Soc. 56(15) p. 64.
- Kenji Matsuoka (M), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Particle-in-cell/Monte Carlo simulation of capacitively coupled chlorine plasmas", 64th Annual Gaseous Electronics Conference, November 15–18, 2011, Salt Palace Convention Center, Salt Lake City, Utah, USA, TF2-3, Bull. Am. Phys. Soc. 56(15) p. 94.
- Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Numerical analysis of inductive and capacitive coupling in radio-frequency micro discharges", 64th Annual Gaseous Electronics Conference, November 15–18, 2011, Salt Palace Convention Center, Salt Lake City, Utah, USA, FTP1-00043, Bull. Am. Phys. Soc. 56(15) p. 36.
- Hirotaka Tsuda (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Modeling and Simulation of Nanoscale Surface Rippling during Plasma Etching of Si under Oblique Ion Incidence", 33rd International Symposium on Dry Process (DPS 2011), November 10-11, 2011, Kyoto Garden Palace Hotel, Kyoto, Japan, B-2, Proc. 33rd Int. Symp. Dry Process, p. 15.
- Kenji Matsuoka (M), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Numerical Simulation of Capacitively Coupled Chlorine Plasma Using Two-dimensional Particle-in-cell/Monte Carlo Method", 33rd International Symposium on Dry Process (DPS 2011), November 10-11, 2011, Kyoto Garden Palace Hotel, Kyoto, Japan, P1-13, Proc. 33rd Int. Symp. Dry Process, p. 47.
- Nobuya Nakazaki (M), Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Ion Incident Energy and Angle Dependence of Si etching with Cl, Br, and HBr beams", 33rd International Symposium on Dry Process (DPS 2011), November 10-11, 2011, Kyoto Garden Palace Hotel, Kyoto, Japan, P1-16, Proc. 33rd Int. Symp. Dry Process, p. 53.
- Asahiko Matsuda (D), Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Defect Profiling Using a Wet-Etch Technique and Photoreflectance Spectroscopy for He- and Ar-Plasma-Damaged Si Substrate", 33rd International Symposium on Dry Process (DPS 2011), November 10-11, 2011, Kyoto Garden Palace Hotel, Kyoto, Japan, E-2, Proc. 33rd Int. Symp. Dry Process, p. 159.
- Asahiko Matsuda (D), Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Improvement in the Evaluation Technique for Plasma-Etch Si Damage using Photoreflectance Spectroscopy with Temperature Control", AVS 58th International Symposium & Exhibition, October 30 - November 4, 2011, Nashville Convention Center, Nashville, TN, USA, PS-ThM9.
- Yoshinori Nakakubo (D), Asahiko Matsuda, Masanaga Fukasawa, Yoshinori Takao, Tetsuya Tatsumi, Koji Eriguchi, and Kouichi Ono: "Effect of Rapid Thermal Annealing on Si Surface Damage by HBr/O2- and H2-Plasma", AVS 58th International Symposium & Exhibition, October 30 - November 4, 2011, Nashville Convention Center, Nashville, TN, USA, PS-ThM12.
- Hirotaka Tsuda (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Three-Dimensional Modeling and Formation Mechanisms of Atomic-Scale Surface Roughness during Si Etching in Chlorine-Based Plasmas", AVS 58th International Symposium & Exhibition, October 30 - November 4, 2011, Nashville Convention Center, Nashville, TN, USA, PS-FrM9.
- Tetsuo Kawanabe (M), Takeshi Takahashi, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Microwave-excited Microplasma Thruster with Applied Magnetic Field", 32nd International Electric Propulsion Conference, September 11–15, 2011, Kurhaus, Wiesbaden, Germany, IEPC-2011-262
- Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Two-Dimensional Particle-in-Cell Simulation of a Micro RF Ion Thruster", 32nd International Electric Propulsion Conference, September 11–15, 2011, Kurhaus, Wiesbaden, Germany, IEPC-2011-076
- [Invited] K. Eriguchi: "Modeling of Parameter Fluctuation Induced by Plasma Process Damage in Metal–Oxide–Semiconductor Field-Effect Transistors", 19th Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD), Daejeon, Korea, Jun. 29, 2011, pp. 1-4.
- Hirotaka Tsuda (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: “Surface Roughness Formation during Si Etching in Cl2 and Cl2/O2 Plasmas: Atomic-scale Analysis of Three-dimensional Feature Profile Evolution”, 4th International Conference on Plasma Nano-Technology & Science (IC-PLANTS 2011), March 10-12, 2011, Takayama Public Cultural Hall, Takayama, Gifu, Japan, Paper O-07, Proceedings, O-07.
- Hirotaka Tsuda (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: “Surface Roughness Formation during Si Etching in Chlorine-based Plasmas: Atomic-scale Analysis of Three-dimensional Feature Profile Evolution”, 2nd International Workshop on Plasma Nano-Interfaces and Plasma Characterization (2WPNI), March 1-4, Hotel Raj, Cerklje, Slovenia, March 2011, Proceedings, pp.41-42.
2010
- Yoshinori Nakakubo (D), Asahiko Matsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Study of Wet-Etch Rate of Plasma-Damaged Surface and Interface Layers and Residual Defect Sites", 32nd International Symposium on Dry Process (DPS 2010), November 11-12, 2010, Tokyo Institute of Technology, Japan, P2-J2, Proc. 32nd Int. Symp. Dry Process, p. 173.
- Hirotaka Tsuda (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Surface Roughness during Si Etching in Chlorine-Based Plasmas", 32nd International Symposium on Dry Process (DPS 2010), November 11-12, 2010, Tokyo Institute of Technology, Japan, H-2, Proc. 32nd Int. Symp. Dry Process, p. 179.
- Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono: "Trade-Off Relationship between Si Recess and Defect Density Formed by Plasma-Induced Damage in Planar MOSFETs and the Optimization Strategies", 32nd International Symposium on Dry Process (DPS 2010), November 11-12, 2010, Tokyo Institute of Technology, Japan, J-1, Proc. 32nd Int. Symp. Dry Process, p. 185.
- Masayuki Kamei (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Comparative Study of Plasma-Charging Damage in High-k Dielectric and p-n Junction and their Effects on Off-State Leakage Current of MOSFETs", 32nd International Symposium on Dry Process (DPS 2010), November 11-12, 2010, Tokyo Institute of Technology, Japan, J-3, Proc. 32nd Int. Symp. Dry Process, p. 189.
- Asahiko Matsuda (D), Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Advanced Contactless Analysis of Plasma-Induced Damage on Si by Temperature-Controlled Photoreflectance Spectroscopy", 32nd International Symposium on Dry Process (DPS 2010), November 11-12, 2010, Tokyo Institute of Technology, Japan, J-4, Proc. 32nd Int. Symp. Dry Process, p. 191.
- [Invited] K. Eriguchi : "Modeling of Plasma-Induced Damage and Its Impacts on Parameter Variations in Advanced Electronic Devices",AVS 57th International Symposium & Exhibition, Albuquerque, USA, Oct. 20, 2010, PS-WeM9.
- [Invited] Kouichi Ono: "Plasma-surface interactions in plasma etching processes for nanometer-scale microelectronic devices", 63rd Gaseous Electronics Conference (GEC) and 7th International Conference on Reactive Plasmas (ICRP), October 4-8, 2010, Maison de la Chimie, Paris, France, QR2.00001. Bull. Am. Phys. Soc. 55(7), 2010, p. 153.
- Hirotaka Tsuda (D), Hiroki Miyata, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "3-dimentional atomics-scale cellular model and feature profile evolution during Si etching in chlorine-based plasmas: Analysis of profile anomalies and surface roughness", 63rd Gaseous Electronics Conference (GEC) and 7th International Conference on Reactive Plasmas (ICRP), October 4-8, 2010, Maison de la Chimie, Paris, France, KWP.00063. Bull. Am. Phys. Soc. 55(7), 2010, p. 119.
- Koji Eriguchi, Yoshinori Takao, and Kouichi Ono: "A Model for Effects of RF Bias Frequency and Waveform on Si Damaged-Layer Formation during Plasma Etching", 63rd Gaseous Electronics Conference (GEC) and 7th International Conference on Reactive Plasmas (ICRP), October 4-8, 2010, Maison de la Chimie, Paris, France, KWP.00054. Bull. Am. Phys. Soc. 55(7), 2010, p. 118.
- Takeshi Takahashi (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "11-GHz Microwave-Excited Microplasma Source for Electrothermal Thruster", 63rd Gaseous Electronics Conference (GEC) and 7th International Conference on Reactive Plasmas (ICRP), October 4-8, 2010, Maison de la Chimie, Paris, France, DTP.00228. Bull. Am. Phys. Soc. 55(7), 2010, p. 97.
- Yoshinori Takao, Kenji Matsuoka, Koji Eriguchi, and Kouichi Ono: "Particle Simulations of Sheath Dynamics in Low Pressure Capacitively Coupled Argon Plasma Discharges", 63rd Gaseous Electronics Conference (GEC) and 7th International Conference on Reactive Plasmas (ICRP), October 4-8, 2010, Maison de la Chimie, Paris, France, CTP.00024. Bull. Am. Phys. Soc. 55(7), 2010, p. 20.
- Takeshi Takahashi (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Numerical Simulation of Microwave-Excited Microplasma Thruster with Helium Propellant", 61st International Astronautical Congress (IAC), September 27-October 1, 2010, Kongresove centrum Praha, Prague, Czech Republic, IAC-10.C4.4.13.
- Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Numerical Analysis of a Micro Ion Thruster Using PIC/MCC Model", 46th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit (JPC), July 25-28, 2010, Nashville, TN, USA, AIAA-2010-6947.
- Yoshinori Takao, Kenji Matsuoka, Koji Eriguchi, and Kouichi Ono: "PIC-MCC Simulations of Capacitive RF Discharges for Plasma Etching", 27th International Symposium on Rarefied Gas Dynamics (RGD), July 10-15, 2010, Asilomar Conference Grounds, Pacific Grove, California, USA, 2010-296.
- Hirotaka Tsuda (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Atomic-scale analysis of plasma-surface interactions and feature profile evolution during Si etching in halogen-based plasmas: Monte Carlo and molecular dynamics approaches", The 10th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 23th Symposium on Plasma Science for Materials (SPSM), July 8, 2010, Lotte Hotel Jeju, Jeju, Korea, 2010-401 (PP442).
- [Invited] Kouichi Ono: "Plasma-surface interactions in plasma etching of high-k dielectrics and metal electrode matrials", The 10th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 23th Symposium on Plasma Science for Materials (SPSM), July 5, 2010, Lotte Hotel Jeju, Jeju, Korea, 2010-558 (ICA-05).
- Hirotaka Tsuda (M), Tatsuya Nagaoka, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Atomic-scale analysis of plasma-surface interactions and feature profile evolution by molecular dynamics approaches", The 3rd International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 2010), March 11-12, 2010, Meijyo University, Nagoya, Japan, P-22. IC-PLANTS 2010 The 3rd International Conference on Plasma-Nanotechnology & Science, 2010, pp. P-22.
- Hirotaka Tsuda (M), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Profile simulation of silicon etching in halogen-based plasmas: Monte Carlo and molecular dynamics approaches", The 1st International Workshop on Plasma Nano-interfaces, January 10, 2010, Nagasaki University, Nagasaki, Japan, FS06.
2009
- Hirotaka Tsuda (M), Tatsuya Nagaoka, Koji Eriguchi, Kouichi Ono, and Hiroaki Ohta: "Fully Atomistic Profile Evolution Simulation of Nanometer-scale Si Trench Etching by Energetic F, Cl, and Br Beams", AVS 56th International Symposium & Exhibition (Plasma Science and Technology), November 8-13, 2009, San Jose Convention Center, San Jose, CA, USA, PS1-ThA8.
- Yoshinori Takao, Takeshi Takahashi, Shunsuke Kitanishi, Koji Eriguchi, and Kouichi Ono: "Optical Measurement of a Microwave-excited Miniature Plasma Source for Micro Propulsion", 62nd Annual Gaseous Electronics Conference (2009 GEC), October 20-23, 2009, Saratoga Springs, NY, USA, FT2.00001. Bull. Am. Phys. Soc. 54(12), 2009, p. 18.
- Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Particle Simulation of a Micro ICP Plasma Source for Miniature Ion Thruster", 62nd Annual Gaseous Electronics Conference (2009 GEC), October 20-23, 2009, Saratoga Springs, NY, USA, KTP.00097. Bull. Am. Phys. Soc. 54(12), 2009, p. 50.
- Hirotaka Tsuda (M), Tatsuya Nagaoka, Hiroki Miyata, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Plasma-surface interactions during Si etching in Cl- and Br-based plasmas: An empirical and atomistic study", 62nd Annual Gaseous Electronics Conference (2009 GEC), October 20-23, 2009, Saratoga Springs, NY, USA, SR3.00004. Bull. Am. Phys. Soc. 54(12), 2009, p. 70.
- Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono: "Comprehensive Modeling of Threshold Voltage Variability Induced by Plasma Damage in Advanced MOSFETs", 2009 International Conference on Solid State Devices and Materials (SSDM 2009), October 7-9, 2009, Sendai Kokusai Hotel, Miyagi, Japan, P-1-24. Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials, 2009, pp. 338-339.
- Asahiko Matsuda (M), Yoshinori Nakakubo, Masayuki Kamei, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Assessment of Ion-Bombardment Damage in Plasma-Exposed Si by Interface Layer Thickness and Charge-Trapping Defects", 2009 International Conference on Solid State Devices and Materials (SSDM 2009), October 7-9, 2009, Sendai Kokusai Hotel, Miyagi, Japan, P-1-28. Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials, 2009, pp. 346-347.
- Hirotaka Tsuda (M), Masahito Mori, Koji Eriguchi, and Kouichi Ono: "Atomic-scale cellular model and profile simulation of Si etching: Analysis of profile anomalies and microscopic uniformity", 31st International Symposium on Dry Process (DPS 2009), September 24-25, 2009, Busan Exhibition & Convention Center, Busan, Korea, 2-P19. Proceedings of 31st International Symposium on Dry Process, 2009, pp. 45-46.
- Yoshinori Nakakubo (D), Asahiko Matsuda, Masanaga Fukasawa, Yoshinori Takao, Tetsuya Tatsumi, Koji Eriguchi, and Kouichi Ono: "Optical and Electrical Characterization of H2 Plasma-Damaged Si Surface Structures and its Impact on In-line Monitoring", 31st International Symposium on Dry Process (DPS 2009), September 24-25, 2009, Busan Exhibition & Convention Center, Busan, Korea, 3-3. Proceedings of 31st International Symposium on Dry Process, 2009, pp. 125-126.
- Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono: "Threshold Voltage Instability Induced by Plasma Process Damage in Advanced MOSFETs", 31st International Symposium on Dry Process (DPS 2009), September 24-25, 2009, Busan Exhibition & Convention Center, Busan, Korea, 9-4. Proceedings of 31st International Symposium on Dry Process, 2009, pp. 267-268.
- Takeshi Takahashi (D), Shunsuke Kitanishi, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Microwave-Excited Microplasma Thruster: Design Improvement for Implemantation to Satellite", 31st International Electric Propulsion Conference (IEPC 2009), September 20-24, 2009, University of Michigan, Ann Arbor, MI, USA, IEPC-2009-190.
- Takeshi Takahashi (D), Yugo Ichida, Shunsuke Kitanishi, Koji Eriguchi, and Kouichi Ono: "Microwave-Excited Microplasma Thruster: Design of Improved Model Aiming for Flight", 27th International Symposium on Space Technology and Science (ISTS 2009), July 5-12, 2009, Tsukuba International Congress Center (Epochal Tsukuba), Ibaraki, Japan, b-21.
- Koji Eriguchi, Asahiko Matsuda, Yoshinori Nakakubo, Masayuki Kamei, Hiroaki Ohta, and Kouichi Ono: "Study of Plasma-Induced "Si Recess Structure" and Its Effects on Threshold Voltage Variability in Advanced MOSFETs", International Conference on IC Design and Technology (ICICDT 2009), May 18-20, 2009, Freescale Semiconductor, Austin, TX, USA, Session E. Proceedings 2009 IEEE International Conference on Integrated Circuit Design and Technology, 2009, pp. 101-104.
- Asahiko Matsuda (M), Yoshinori Nakakubo, Riki Ogino, Hiroaki Ohta, Koji Eriguchi, and Kouichi Ono: "Simulation and Experimental Study on the Characteristics of Plasma-Induced Damage and Methodology for Accurate Damage Analysis", International Conference on IC Design and Technology (ICICDT 2009), May 18-20, 2009, Freescale Semiconductor, Austin, TX, USA, Session E. Proceedings 2009 IEEE International Conference on Integrated Circuit Design and Technology, 2009, pp. 97-100.