2012年8月7日 (火) 18:26時点における版

DPS 2011

(Showing presentations in the last 3 years)

2012

• Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono: "Unifed Model-Prediction Framework for MOSFET Performance Degradation by Plasma-Induced Si Damage and its Application to Process Parameter Optimization", Plasma Etch and Strip in Microelectronics, March 15–16, 2012, Minatec, Grenoble, France.
• Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Optical Characterization of Plasma-Induced Si Damage by Ar and Cl₂ Inductively Coupled Plasmas", Plasma Etch and Strip in Microelectronics, March 15–16, 2012, Minatec, Grenoble, France.
• [Invited] Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Model Analysis of Nanoscale Surface Roughness and Rippling during Plasma Etching of Si under Oblique Ion Incidence: Effects of Oxygen Addition", The 5th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 2012), March 9-10, 2012, Freude, Inuyama International Sightseeing Center, Aichi, Japan, S-2. IC-PLANTS 2012 The 5th International Conference on Plasma-Nanotechnology & Science, 2012, pp. S-02.
• Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Si Etching with Cl beams: Ion Incident Angle and Neutral Radical Flux Dependence" , The 5th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 2012), March 9-10, 2012, Freude, Inuyama International Sightseeing Center, Aichi, Japan, S-2. IC-PLANTS 2012 The 5th International Conference on Plasma-Nanotechnology & Science, 2012, pp. P-36.

2011

• Hiroki Miyata, Hirotaka Tsuda, Daisuke Fukushima, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Fourier Transofrm Infrared Absorption Spectroscopy of Gas-Phase and Surface Reaction Products during Si Etching in Inductively Coupled Cl₂ Plasmas", 64th Annual Gaseous Electronics Conference, November 15–18, 2011, Salt Palace Convention Center, Salt Lake City, Utah, USA, NR1-10, Bull. Am. Phys. Soc. 56(15) p. 64.
• Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Ion Incident Energy and Angle Dependences of Si etching with Cl, Br, and HBr beams", 64th Annual Gaseous Electronics Conference, November 15–18, 2011, Salt Palace Convention Center, Salt Lake City, Utah, USA, NR1-11, Bull. Am. Phys. Soc. 56(15) p. 64.
• Kenji Matsuoka, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Particle-in-cell/Monte Carlo simulation of capacitively coupled chlorine plasmas", 64th Annual Gaseous Electronics Conference, November 15–18, 2011, Salt Palace Convention Center, Salt Lake City, Utah, USA, TF2-3, Bull. Am. Phys. Soc. 56(15) p. 94.
• Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Numerical analysis of inductive and capacitive coupling in radio-frequency micro discharges", 64th Annual Gaseous Electronics Conference, November 15–18, 2011, Salt Palace Convention Center, Salt Lake City, Utah, USA, FTP1-00043, Bull. Am. Phys. Soc. 56(15) p. 36.
• Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Modeling and Simulation of Nanoscale Surface Rippling during Plasma Etching of Si under Oblique Ion Incidence", 33rd International Symposium on Dry Process (DPS 2011), November 10-11, 2011, Kyoto Garden Palace Hotel, Kyoto, Japan, B-2, Proc. 33rd Int. Symp. Dry Process, p. 15.
• Kenji Matsuoka, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Numerical Simulation of Capacitively Coupled Chlorine Plasma Using Two-dimensional Particle-in-cell/Monte Carlo Method", 33rd International Symposium on Dry Process (DPS 2011), November 10-11, 2011, Kyoto Garden Palace Hotel, Kyoto, Japan, P1-13, Proc. 33rd Int. Symp. Dry Process, p. 47.
• Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Ion Incident Energy and Angle Dependence of Si etching with Cl, Br, and HBr beams", 33rd International Symposium on Dry Process (DPS 2011), November 10-11, 2011, Kyoto Garden Palace Hotel, Kyoto, Japan, P1-16, Proc. 33rd Int. Symp. Dry Process, p. 53.
• Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Defect Profiling Using a Wet-Etch Technique and Photoreflectance Spectroscopy for He- and Ar-Plasma-Damaged Si Substrate", 33rd International Symposium on Dry Process (DPS 2011), November 10-11, 2011, Kyoto Garden Palace Hotel, Kyoto, Japan, E-2, Proc. 33rd Int. Symp. Dry Process, p. 159.
• Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Improvement in the Evaluation Technique for Plasma-Etch Si Damage using Photoreflectance Spectroscopy with Temperature Control", AVS 58th International Symposium & Exhibition, October 30 - November 4, 2011, Nashville Convention Center, Nashville, TN, USA, PS-ThM9.
• Yoshinori Nakakubo, Asahiko Matsuda, Masanaga Fukasawa, Yoshinori Takao, Tetsuya Tatsumi, Koji Eriguchi, and Kouichi Ono: "Effect of Rapid Thermal Annealing on Si Surface Damage by HBr/O₂- and H₂-Plasma", AVS 58th International Symposium & Exhibition, October 30 - November 4, 2011, Nashville Convention Center, Nashville, TN, USA, PS-ThM12.
• Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Three-Dimensional Modeling and Formation Mechanisms of Atomic-Scale Surface Roughness during Si Etching in Chlorine-Based Plasmas", AVS 58th International Symposium & Exhibition, October 30 - November 4, 2011, Nashville Convention Center, Nashville, TN, USA, PS-FrM9.
• Tetsuo Kawanabe, Takeshi Takahashi, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Microwave-excited Microplasma Thruster with Applied Magnetic Field", 32nd International Electric Propulsion Conference, September 11–15, 2011, Kurhaus, Wiesbaden, Germany, IEPC-2011-262
• Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Two-Dimensional Particle-in-Cell Simulation of a Micro RF Ion Thruster", 32nd International Electric Propulsion Conference, September 11–15, 2011, Kurhaus, Wiesbaden, Germany, IEPC-2011-076
• Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: “Surface Roughness Formation during Si Etching in Cl2 and Cl2/O2 Plasmas: Atomic-scale Analysis of Three-dimensional Feature Profile Evolution”, 4th International Conference on Plasma Nano-Technology & Science (IC-PLANTS 2011), March 10-12, 2011, Takayama Public Cultural Hall, Takayama, Gifu, Japan, Paper O-07, Proceedings, O-07.
• Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: “Surface Roughness Formation during Si Etching in Chlorine-based Plasmas: Atomic-scale Analysis of Three-dimensional Feature Profile Evolution”, 2nd International Workshop on Plasma Nano-Interfaces and Plasma Characterization (2WPNI), March 1-4, Hotel Raj, Cerklje, Slovenia, March 2011, Proceedings, pp.41-42.

2010

• Yoshinori Nakakubo (D), Asahiko Matsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Study of Wet-Etch Rate of Plasma-Damaged Surface and Interface Layers and Residual Defect Sites", 32nd International Symposium on Dry Process (DPS 2010), November 11-12, 2010, Tokyo Institute of Technology, Japan, P2-J2, Proc. 32nd Int. Symp. Dry Process, p. 173.
• Hirotaka Tsuda (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Molecular Dynamics Analysis of Surface Roughness during Si Etching in Chlorine-Based Plasmas", 32nd International Symposium on Dry Process (DPS 2010), November 11-12, 2010, Tokyo Institute of Technology, Japan, H-2, Proc. 32nd Int. Symp. Dry Process, p. 179.
• Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono: "Trade-Off Relationship between Si Recess and Defect Density Formed by Plasma-Induced Damage in Planar MOSFETs and the Optimization Strategies", 32nd International Symposium on Dry Process (DPS 2010), November 11-12, 2010, Tokyo Institute of Technology, Japan, J-1, Proc. 32nd Int. Symp. Dry Process, p. 185.
• Masayuki Kamei (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Comparative Study of Plasma-Charging Damage in High-k Dielectric and p-n Junction and their Effects on Off-State Leakage Current of MOSFETs", 32nd International Symposium on Dry Process (DPS 2010), November 11-12, 2010, Tokyo Institute of Technology, Japan, J-3, Proc. 32nd Int. Symp. Dry Process, p. 189.
• Asahiko Matsuda (D), Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Advanced Contactless Analysis of Plasma-Induced Damage on Si by Temperature-Controlled Photoreflectance Spectroscopy", 32nd International Symposium on Dry Process (DPS 2010), November 11-12, 2010, Tokyo Institute of Technology, Japan, J-4, Proc. 32nd Int. Symp. Dry Process, p. 191.
• [Invited] Kouichi Ono: "Plasma-surface interactions in plasma etching processes for nanometer-scale microelectronic devices", 63rd Gaseous Electronics Conference (GEC) and 7th International Conference on Reactive Plasmas (ICRP), October 4-8, 2010, Maison de la Chimie, Paris, France, QR2.00001. Bull. Am. Phys. Soc. 55(7), 2010, p. 153.
• Hirotaka Tsuda (D), Hiroki Miyata, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "3-dimentional atomics-scale cellular model and feature profile evolution during Si etching in chlorine-based plasmas: Analysis of profile anomalies and surface roughness", 63rd Gaseous Electronics Conference (GEC) and 7th International Conference on Reactive Plasmas (ICRP), October 4-8, 2010, Maison de la Chimie, Paris, France, KWP.00063. Bull. Am. Phys. Soc. 55(7), 2010, p. 119.
• Koji Eriguchi, Yoshinori Takao, and Kouichi Ono: "A Model for Effects of RF Bias Frequency and Waveform on Si Damaged-Layer Formation during Plasma Etching", 63rd Gaseous Electronics Conference (GEC) and 7th International Conference on Reactive Plasmas (ICRP), October 4-8, 2010, Maison de la Chimie, Paris, France, KWP.00054. Bull. Am. Phys. Soc. 55(7), 2010, p. 118.
• Takeshi Takahashi (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "11-GHz Microwave-Excited Microplasma Source for Electrothermal Thruster", 63rd Gaseous Electronics Conference (GEC) and 7th International Conference on Reactive Plasmas (ICRP), October 4-8, 2010, Maison de la Chimie, Paris, France, DTP.00228. Bull. Am. Phys. Soc. 55(7), 2010, p. 97.
• Yoshinori Takao, Kenji Matsuoka, Koji Eriguchi, and Kouichi Ono: "Particle Simulations of Sheath Dynamics in Low Pressure Capacitively Coupled Argon Plasma Discharges", 63rd Gaseous Electronics Conference (GEC) and 7th International Conference on Reactive Plasmas (ICRP), October 4-8, 2010, Maison de la Chimie, Paris, France, CTP.00024. Bull. Am. Phys. Soc. 55(7), 2010, p. 20.
• Takeshi Takahashi (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Numerical Simulation of Microwave-Excited Microplasma Thruster with Helium Propellant", 61st International Astronautical Congress (IAC), September 27-October 1, 2010, Kongresove centrum Praha, Prague, Czech Republic, IAC-10.C4.4.13.
• Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Numerical Analysis of a Micro Ion Thruster Using PIC/MCC Model", 46th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit (JPC), July 25-28, 2010, Nashville, TN, USA, AIAA-2010-6947.
• Yoshinori Takao, Kenji Matsuoka, Koji Eriguchi, and Kouichi Ono: "PIC-MCC Simulations of Capacitive RF Discharges for Plasma Etching", 27th International Symposium on Rarefied Gas Dynamics (RGD), July 10-15, 2010, Asilomar Conference Grounds, Pacific Grove, California, USA, 2010-296.
• Hirotaka Tsuda (D), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Atomic-scale analysis of plasma-surface interactions and feature profile evolution during Si etching in halogen-based plasmas: Monte Carlo and molecular dynamics approaches", The 10th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 23th Symposium on Plasma Science for Materials (SPSM), July 8, 2010, Lotte Hotel Jeju, Jeju, Korea, 2010-401 (PP442).
• [Invited] Kouichi Ono: "Plasma-surface interactions in plasma etching of high-k dielectrics and metal electrode matrials", The 10th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 23th Symposium on Plasma Science for Materials (SPSM), July 5, 2010, Lotte Hotel Jeju, Jeju, Korea, 2010-558 (ICA-05).
• Hirotaka Tsuda (M), Tatsuya Nagaoka, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Atomic-scale analysis of plasma-surface interactions and feature profile evolution by molecular dynamics approaches", The 3rd International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 2010), March 11-12, 2010, Meijyo University, Nagoya, Japan, P-22. IC-PLANTS 2010 The 3rd International Conference on Plasma-Nanotechnology & Science, 2010, pp. P-22.
• Hirotaka Tsuda (M), Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Profile simulation of silicon etching in halogen-based plasmas: Monte Carlo and molecular dynamics approaches", The 1st International Workshop on Plasma Nano-interfaces, January 10, 2010, Nagasaki University, Nagasaki, Japan, FS06.

2009

• Hirotaka Tsuda (M), Tatsuya Nagaoka, Koji Eriguchi, Kouichi Ono, and Hiroaki Ohta: "Fully Atomistic Profile Evolution Simulation of Nanometer-scale Si Trench Etching by Energetic F, Cl, and Br Beams", AVS 56th International Symposium & Exhibition (Plasma Science and Technology), November 8-13, 2009, San Jose Convention Center, San Jose, CA, USA, PS1-ThA8.
• Yoshinori Takao, Takeshi Takahashi, Shunsuke Kitanishi, Koji Eriguchi, and Kouichi Ono: "Optical Measurement of a Microwave-excited Miniature Plasma Source for Micro Propulsion", 62nd Annual Gaseous Electronics Conference (2009 GEC), October 20-23, 2009, Saratoga Springs, NY, USA, FT2.00001. Bull. Am. Phys. Soc. 54(12), 2009, p. 18.
• Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Particle Simulation of a Micro ICP Plasma Source for Miniature Ion Thruster", 62nd Annual Gaseous Electronics Conference (2009 GEC), October 20-23, 2009, Saratoga Springs, NY, USA, KTP.00097. Bull. Am. Phys. Soc. 54(12), 2009, p. 50.
• Hirotaka Tsuda (M), Tatsuya Nagaoka, Hiroki Miyata, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Plasma-surface interactions during Si etching in Cl- and Br-based plasmas: An empirical and atomistic study", 62nd Annual Gaseous Electronics Conference (2009 GEC), October 20-23, 2009, Saratoga Springs, NY, USA, SR3.00004. Bull. Am. Phys. Soc. 54(12), 2009, p. 70.
• Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono: "Comprehensive Modeling of Threshold Voltage Variability Induced by Plasma Damage in Advanced MOSFETs", 2009 International Conference on Solid State Devices and Materials (SSDM 2009), October 7-9, 2009, Sendai Kokusai Hotel, Miyagi, Japan, P-1-24. Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials, 2009, pp. 338-339.
• Asahiko Matsuda (M), Yoshinori Nakakubo, Masayuki Kamei, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Assessment of Ion-Bombardment Damage in Plasma-Exposed Si by Interface Layer Thickness and Charge-Trapping Defects", 2009 International Conference on Solid State Devices and Materials (SSDM 2009), October 7-9, 2009, Sendai Kokusai Hotel, Miyagi, Japan, P-1-28. Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials, 2009, pp. 346-347.
• Hirotaka Tsuda (M), Masahito Mori, Koji Eriguchi, and Kouichi Ono: "Atomic-scale cellular model and profile simulation of Si etching: Analysis of profile anomalies and microscopic uniformity", 31st International Symposium on Dry Process (DPS 2009), September 24-25, 2009, Busan Exhibition & Convention Center, Busan, Korea, 2-P19. Proceedings of 31st International Symposium on Dry Process, 2009, pp. 45-46.
• Yoshinori Nakakubo (D), Asahiko Matsuda, Masanaga Fukasawa, Yoshinori Takao, Tetsuya Tatsumi, Koji Eriguchi, and Kouichi Ono: "Optical and Electrical Characterization of H₂ Plasma-Damaged Si Surface Structures and its Impact on In-line Monitoring", 31st International Symposium on Dry Process (DPS 2009), September 24-25, 2009, Busan Exhibition & Convention Center, Busan, Korea, 3-3. Proceedings of 31st International Symposium on Dry Process, 2009, pp. 125-126.
• Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono: "Threshold Voltage Instability Induced by Plasma Process Damage in Advanced MOSFETs", 31st International Symposium on Dry Process (DPS 2009), September 24-25, 2009, Busan Exhibition & Convention Center, Busan, Korea, 9-4. Proceedings of 31st International Symposium on Dry Process, 2009, pp. 267-268.
• Takeshi Takahashi (D), Shunsuke Kitanishi, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono: "Microwave-Excited Microplasma Thruster: Design Improvement for Implemantation to Satellite", 31st International Electric Propulsion Conference (IEPC 2009), September 20-24, 2009, University of Michigan, Ann Arbor, MI, USA, IEPC-2009-190.
• Takeshi Takahashi (D), Yugo Ichida, Shunsuke Kitanishi, Koji Eriguchi, and Kouichi Ono: "Microwave-Excited Microplasma Thruster: Design of Improved Model Aiming for Flight", 27th International Symposium on Space Technology and Science (ISTS 2009), July 5-12, 2009, Tsukuba International Congress Center (Epochal Tsukuba), Ibaraki, Japan, b-21.
• Koji Eriguchi, Asahiko Matsuda, Yoshinori Nakakubo, Masayuki Kamei, Hiroaki Ohta, and Kouichi Ono: "Study of Plasma-Induced "Si Recess Structure" and Its Effects on Threshold Voltage Variability in Advanced MOSFETs", International Conference on IC Design and Technology (ICICDT 2009), May 18-20, 2009, Freescale Semiconductor, Austin, TX, USA, Session E. Proceedings 2009 IEEE International Conference on Integrated Circuit Design and Technology, 2009, pp. 101-104.
• Asahiko Matsuda (M), Yoshinori Nakakubo, Riki Ogino, Hiroaki Ohta, Koji Eriguchi, and Kouichi Ono: "Simulation and Experimental Study on the Characteristics of Plasma-Induced Damage and Methodology for Accurate Damage Analysis", International Conference on IC Design and Technology (ICICDT 2009), May 18-20, 2009, Freescale Semiconductor, Austin, TX, USA, Session E. Proceedings 2009 IEEE International Conference on Integrated Circuit Design and Technology, 2009, pp. 97-100.